Seeing Inside Future Generations of Advanced Micro-electronics

Ptyko, Inc. is building the future of micro-electronic chip metrology, enabling non-destructive, few nanometer resolution methods for applications to next-generation manufacturing, from inline quality control to functional and design analysis of fully realized devices.

The Ptyko Vision

The urgent need for dramatic advancements chip metrology has been identified in the micro-electronics manufacturing community. A new non-destructive method for chip imaging, ptychographic laminography (PyXL) shows the promise of a zoom-capable, few nm-resolution 3D imaging of micro-electronic devices. This method is currently slow, taking days to weeks of measurement and analysis. The key bottlenecks are in source flux and the computational grand challenge of image reconstruction

The Ptyko solution is to engage in developing a new class of coherent light source, the ultra-compact X-ray free-electron laser (UC-XFEL). The XFEL is currently only found in natiional labs, and while it is a scientific juggernaut, it has limited impact on frontier industrial applications. The UC-XFEL is born out of the expertise of pioneering experts in XFELs, accelerators, and coherent imaging methods. Ptyko is simultaneously pushing the cutting edge in high-flux coherent X-rays, and developing the new needs for PyXL-based metrology that can fully utilized UC-XFEL capabilities.

Ptyko Services

In developing next generation chip metrology tools, Ptyko has many technology milestones to surpass. These present opportunities to serve the market for advanced, non-destructive measurements on micro-electronic devices

  • PyXL measurements on existing coherent X-ray sources give detailed, non-real time images of micro-electronic structures down to the 10 nm scale. These measurements can be performed and analyzed by Ptyko for interested partiels.

  • Ptyko is engaged in the physics and engineering of the sophisticated accelerator and magnetic components of of the UC-XFEL. It is developing new software tools for digital twins to provide start-to-end models from the birth of electrons through use of coherent X-rays in PyXL. These design services are available to others through contract agreement.

  • Ptyko and its partners in technology development are continually providing new approaches to the challenges of frontier accelerator systems, free-electron lasers, and X-ray maniputlation and measurement. Ptyko is eager to extend the reach of this technology through contract agreements and joint ventures.

For inquiries into Ptyko services, please contact:

jrosenzweig@ptyko-sc.com

Image courtesy Paul Scherrer Institute